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Design and Realization of Plasma Treatment Auxiliary Device

, Jigao LIU, Xianzhe WANG, , Chi MA, · Frontiers of Chinese Mechanical Engineering and Technology · 2024

Surface treatment, as a process to obtain specific components on the surface of a substrate, can significantly improve the surface properties, such as the plasma surface treatment process, which has the effect of cleaning the surface contaminants, improving the surface wettability and improving the adhesive strength, and has been widely used in automotive, aerospace, construction, intelligent manufacturing and other fields. Due to the complexity of the surface treatment process of the plasma process, specialized auxiliary devices are required in the treatment, however, the existing auxiliary devices are expensive and difficult to meet the demand for customized surface treatment process in the laboratory. To address the above problems, this paper designs a plasma processing auxiliary device with CS10-3 controller as the core, using the controller, stepper motor, driver and transfer switch as the control system, with the rack, fixed block, slide and adjustment block to realize plasma surface treatment operation, which can realize the purpose of quantifying process parameters (speed, distance, power, etc. ) on the basis of significantly reducing the development cost of the equipment.

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