Abstract Exposure to harsh radiation environments leads to displacement damage in semiconductor materials, ultimately degrading the device performance. Molecular dynamics (MD) is a powerful method for simulating the dynamic processes of radiation-induced defect generation, clustering, and evolution, which are often beyond the reach of experimental observation. In this work, we introduce a machine-learning Gaussian approximation potential for germanium, specifically designed to describe properties related to radiation-induced collision cascades and the resulting damage. A repulsive potential is incorporated to accurately capture short-range interactions during cascade simulations. In addition, we reproduce elastic, thermal, and vibrational properties, and accurately capture the energetics of vacancies and self-interstitials. These high-fidelity predictions are comparable to ab initio calculations while requiring only a compact training database. This potential is expected to facilitate accurate MD simulations of radiation damage in germanium with greatly improved accuracy compared to empirical potentials.
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