Nonlinear magnetic levitation control by four‐point attraction

AbstractRubber components of production equipment are a significant source of contamination in the fabrication of VLSI devices and other semiconductor products. One approach to solving this problem is to use a magnetic levitation system for noncontact transfer. The force nonlinearity of magnetic circuits presents a problem, particularly when the gap between the magnets and the levitated vehicle is small. Linearization methods that allow effective control do exist, but in this paper an alternative method not based on linearization is proposed. The design involves magnetic levitation control by 4‐point attraction. The experimental results indicate that the idea is an effective one.