Slot antenna‐coupled thin‐film warm carrier far‐infrared radiation detectors

AbstractSlot antenna‐coupled thin‐film warm carrier devices were fabricated, and the detection properties were investigated at 94 and 700 GHz. Two‐dimensional 8 × 3 slot antenna arrays fed by a coplanar waveguide were used as the antennas. The thin‐film antennas were fabricated with a photolithographic method, and the warm carrier detectors, which have a contact area of 8 × 10−10cm2, were fabricated with an electron beam lithographic method. The experimental results indicate that the fabricated devices receive the far‐infrared radiation with antenna and rectified it with nonlinear I–V characteristic. By changing the antenna from the single‐slot antenna to the two‐dimensional 8 × 3 slot antenna array, the detected sensitivity improved by 11 dB. © 2005 Wiley Periodicals, Inc. Electr Eng Jpn, 151(4): 1–6, 2005; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/eej.20083